Downward laser trimming of thick film resistors
نویسندگان
چکیده
منابع مشابه
Effects of High Voltage Pulse Trimming on Structural Properties of Thick-Film Resistors
Nowadays, compact and reliable electronic devices including up-to-date ceramic micro-electro-mechanical systems require thick-film resistors with significantly reduced dimensions and stable and precise resistance values. For that reason, instead of standard laser trimming method, high voltage pulse trimming of thick-film resistors is being introduced. This method allows controlled and reliable ...
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Results of thorough experimental studies on electrical properties of thick-film resistors (TFRs) have been overviewed and summarized. Experiments covered resistance and noise measurements in wide temperature range. Low-frequency noise spectroscopy has been used for the investigations of fluctuating phenomena. Sample resistors were prepared of various combinations of commercial and laboratory-ma...
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The non-linear electro-ultrasonic spectroscopy was used as a non-destructive testing method for the polymer based and cermet thick film resistors evaluation. We carried out the correlation between this method and standard testing methods as noise spectroscopy and the third harmonic voltage measurements. The measuring set-up with the ultrasonic transducer working on the frequency range 10 kHz to...
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Methodsfor predictingthe performanceof laser-trimmed film resistors taking into account the properties of the heat-affected zone (HAZ) are discussed. A figure of merit based npon a sensitivity fnnction called HAZ sensitivity, SHA z , is introduced which is useful for determining aging and temperature effects of an arbitrary film-resistor geometry with an arbitrary trim strategy. ~H4 z is also s...
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Major part of this work was carried out in Hsinchu. ABSTRACT Mask-making process using laser direct-write has been broadly applied in the microelectronics and the PC board industries. In this paper, we report the thick-film lithography of laser write mainly for the x-ray mask in the LIGA application. Several schemes of multiple writing are successfully demonstrated in terms of the sidewall stra...
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ژورنال
عنوان ژورنال: IEEE Transactions on Components, Hybrids, and Manufacturing Technology
سال: 1991
ISSN: 0148-6411
DOI: 10.1109/33.105151